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Piezo Valves

Piezo Valves

Festo piezo valves are ultra-compact, energy-efficient pneumatic control valves using piezo-actuator technology. They deliver precise flow or pressure regulation, extremely fast switching, minimal power consumption and long service life—ideal for demanding automation, medical, lab and semiconductor applications.
Category: Pneumatics
Brand: Festo

Festo Piezo Valves

Festo’s piezo valves represent a cutting-edge solution in pneumatic control technology, combining micro-actuator mechanics with robust valve engineering to deliver high-precision performance in compact formats. These valves are based on a piezoelectric actuator principle rather than traditional solenoids, enabling remarkably low power consumption, silent operation, quick response times, and virtually no heat generation.

The valve portfolio includes multiple functions—such as 2/2-way and 3/3-way configurations—and can serve as proportional flow or pressure control valves when combined with sensors and control electronics.

Important: Piezo valves provide extremely high efficiency, miniature installation size, and superior control accuracy, making them ideal for tasks where space, energy and precision matter.

Design & Functionality

Piezo valves operate by applying a voltage to a piezoelectric ceramic actuator, which deforms and thus causes the valve spool or poppet to move. Because the actuator behaves like a capacitor, once charged it consumes almost no continuous current—unlike a solenoid coil. 

Available variants cover:
• 2/2-way normally closed valves for flow cut-off and on/off control.
• 3/3-way proportional valves with pressurisation/exhaust functions enabling fine control of pressure or flow. 
• Compact body designs for applications with restricted space, light-weight construction and minimal mounting footprint. 

Important: The unique principle of operation means these valves generate negligible heat, require minimal power, and are highly suited for battery-powered or thermally sensitive systems.

Total Crossed Beams

The Festo piezo valve series offers full functional coverage—from simple on/off directional control to finely tuned proportional regulation of gases and compressed air. This means across the series you can find solutions for flow control, pressure regulation, vacuum handling and fast switching applications.

The valves maintain consistent performance regardless of mounting orientation, making them versatile for machine builders and OEMs.

Beam Pitch Options

Piezo valves cover a wide spectrum of configurations:
• Nominal widths from ~0.7 mm up to ~1.7 mm (depending on model) for very small flow applications. 
• Pressure ranges from vacuum/low-bar through to several bar (for example 0…6 bar) depending on design. 
• Electrical control options: variable voltage control for proportional actuation; very low current draw in steady state. 
• Special material variants and oxygen-compatible versions for use in medical or semiconductor environments. 

Important: The broad selection of flow/pressure ranges and extremely low operating power allow these valves to be tailored to extremely demanding, space-constrained or energy-sensitive systems.

Intrinsic Synchronism

The internal piezo actuator and valve mechanism deliver rapid, synchronized switching with minimal lag and very high repeatability. Because there are no large electromagnetic coils, the mechanical movement is smoother and less prone to wear. This supports high cycle count applications and systems requiring consistent performance over long periods.

Operational Advantages

• Ultra-low power consumption and near-zero holding current after actuation. 
• Silent switching with minimal audible noise — ideal for medical devices or quiet automation environments. 
• Compact size and light weight, enabling integration into space-limited equipment or mobile applications. 
• Highly precise control of flow or pressure when used with control electronics and sensors, making them suitable for dosing, metering or vacuum control. 
• Long service life and high reliability due to fewer moving parts and minimal electrical load. 

Applications:
Semiconductor gas control, laboratory automation, miniature dosing of adhesives, mobile ventilators in medical technology, lightweight handling systems, battery-operated devices, vacuum and compressed-air metering.

Technical Specifications

 

Parameter

Typical Piezo Valve Series (2/2-way or 3/3-way)

Proportional / High-Precision Variant

Product TypePiezo-actuated pneumatic control valvePiezo-actuated proportional flow / pressure control valve
Valve Function2/2-way (on/off) or 3/3-way (proportional)3/3-way proportional (pressurise/exhaust)
Nominal Width / Port Size~0.7 mm … ~1.7 mm nominal width~1.2 mm … ~1.7 mm or higher (model-dependent)
Pressure Range0 … ~6 bar or vacuum to low bar (depending on model) Low to medium pressure ranges up to several bars
Flow RateUp to ~80 l/min at 6 bar for some variantsPrecise low flow rates with high control resolution
Power ConsumptionExtremely low holding power; negligible once state is reached Very low energy use; heat generation minimal
Switching SpeedVery fast response times (<10 ms) for some variants High dynamic response; proportional characteristics
Mounting / ConstructionFlange or manifold mounting; ultra-compact bodyCompact design; oxygen-compatible or special gas variants
MediaCompressed air, inert gases, oxygen (depending on variant) As above
Material & SealsLightweight housing, piezo ceramic actuator, compatible sealsHigh precision materials, optional materials for harsh environments
Typical ApplicationsOn/off control in compact systemsFine metering, dosing, vacuum/pressure control, medical devices